The technique that used to measure the mechanical properties for mems is different from the traditional one considering the size scale . a uniaxial tension test system for test the mechanical property of mems materials is presented in this thesis . the strain is measured by interference strain / displacement gauge ( isdg ) 本文介绍了新近研制的用于测量微电子机械系统mems材料的机械性能的单轴拉伸试验系统，采用激光干涉技术测量试样应变，得到材料从开始变形直至破坏的全历程应力应变曲线。
